In order to clarify the application feasibility of the plasma jet reactor operating under low pressure (~100Torr) to thermoelectric materials processing, we have studied production of ultrafine particles of refractory materials and synthesis of β-Al_2O_3. We have confirmed that many ultrafine particles have been produced in the pressure range from 100 Torr to 55Torr, and that the shape and the diameter of the produced particles depend on both the diameter of raw powder materials and the jet power. Further more, it is also found that β-Al_2O_3 are successfully synthesized from the mixture of α-Al_2O_3 and Na_2CO_3 particles under not only atmospheric pressure but also low pressure.