Memoirs of the Faculty of Engineering, Yamaguchi University
Back to Top
Permalink : https://petit.lib.yamaguchi-u.ac.jp/15013
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 31 Issue 1
published_at 1980
Transparent Electrically Conducting Cd-Sn Oxide Films by D-C Reactive Sputtering (II)
直流反応性スパッタ法による Cd-Sn 酸化物透明導電膜 (II)
Yamaguchi Yoshihiro
Miyata Naoyuki
Miyake Kiyoshi
About This Article
Descriptions
Cadmium-tin oxide (CTO) films with high conductivity and high visible transmission were prepared by dc reactive sputtering from a Cd-Sn alloy target in an Ar-O_2 atmosphere. The electrical and optical properties of these films were found to depend strongly upon the oxygen concentration in an Ar-O_2 atmosphere during deposition. Films with the lowest resistivity of 2.0×(10)^<-4>Ωcm, the highest transmission of 90% over the visible region have been obtained under the condition of 6% oxygen concentration in an Ar-O_2 atmosphere. The structure of the films were examined by X-ray diffraction. These films exhibited a broad Cd_2SnO_4 (130) peak.
Other Article
PP. 51 - 60
Deterioration in the Mechanical Strength of Commercial Carbon Steels Exposed in Various Environments
PP. 61 - 70
PP. 163 - 169