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誘導結合型プラズマ(ICP)を利用したマグネトロンスパッタ装置を試作し、Co-Cr垂直磁気異方性膜の作製を行った。誘導結合型プラズマ支援マグネトロンスパッタ装置では、高周波によるプラズマ生成と、ターゲットに印可した直流によるスパッタ成膜とが機能分離できているために、通常のマグネトロンスパッタ法ではプラズマの維持が不可能な低いターゲット電圧領域においてもCo-Cr薄膜の作成が可能なことが明らかになった。ICPを用いることで、通常のマグネトロンスパッタ法のみの場合よりも、高い成膜速度が実現できた。ICP電力を増すと、作製したCo-Cr膜の垂直磁気異方性は減少する傾向がみられた。大きな垂直磁気異方性をもつCo-Cr膜を高速に作製するには、ICPを用いることに加えて、正の基板バイアス電圧の印可を併用することが効果的であるとの見通しを得た。
Creators : 林 利彦 | Yamamoto Setsuo | Kurisu Hiroki | 松浦 満 Publishers : 電子情報通信学会 Date Issued : 1997-06-13
Photoinduced formation of CdSSe nanocrystals in glass
Japanese journal of applied physics. Pt. 1, Regular papers & short notes Volume 37 Issue 1
Creators : Miyoshi Tadaki | Fukuda Hirofumi | Matsuo Naoto Publishers : 応用物理学会 Date Issued : 1998-01
Creators : Takeda Kenji | Imaoka Teruyoshi Publishers : 日本地質学会 Date Issued : 1999-11
Creators : Satoh Eiichi | Imaoka Teruyoshi | Itaya Tetsumaru Publishers : 日本地質学会 Date Issued : 1999-11
Creators : Imaoka Teruyoshi | Nishimura Yujiro | Yoshihara Kazuhiko | Tanaka Morimasa | Kagami Hiroo Publishers : 日本地質学会 Date Issued : 1999-11
Creators : Yuge Tomoko | Imaoka Teruyoshi | Iizumi Shigeru Publishers : 日本地質学会 Date Issued : 1998-03
Relationship between control of reactive plasmas with magnetic filter and formation of thin films
Japanese journal of applied physics. Pt. 1, Regular papers & short notes Volume 36 Issue 7B
Creators : Fukumasa Osamu | Tauchi Yasushi | Sakiyama Satoshi Publishers : 応用物理学会 Date Issued : 1997-07
Negative ion volume production in electron cyclotron resonance hydrogen plasmas
Japanese journal of applied physics. Pt. 1, Regular papers & short notes Volume 38 Issue 7B
Creators : Fukumasa Osamu | Matsumori Masanori Publishers : 応用物理学会 Date Issued : 1999-07
A novel resonant coupling type microstrip line interconnect
IEICE transactions on electronics Volume E82-C Issue 1
Creators : Hotta Masashi | Qian Yongxi | Itoh Tatsuo Publishers : 電子情報通信学会 Date Issued : 1999-01
Synthesis of β”-alumina from powder mixtures using thermal plasma processing
Japanese journal of applied physics. Pt. 1, Regular papers & short notes Volume 38 Issue 7B
Creators : Fukumasa Osamu | Sakiyama Satoshi | Esaki Hirotoshi Publishers : 応用物理学会 Date Issued : 1999-07
Creators : Sakiyama Satoshi | Fukumasa Osamu Publishers : 日本金属学会 Date Issued : 1999
Enhancement of H^- Volume Production in Double Plasma Discharge
Journal of the Physical Society of Japan Volume 65 Issue 11
Creators : Fukumasa Osamu | Nishimura Hideki Publishers : The Physical Society of Japan Date Issued : 1996-11
A model for supersymmetry : An extension of the chen-walker's model
Journal of the Physical Society of Japan Volume 68 Issue 4
Creators : Mashiyama Hiroyuki | Mashiyama Kazuko T. Publishers : The Physical Society of Japan Date Issued : 1999
Laser-induced reversion of photodarkening in CdS-doped glass
Japanese journal of applied physics. Pt. 1, Regular papers & short notes Volume 36 Issue 11
Creators : Miyoshi Tadaki | Nitta Koji | Ohkuni Hiroyuki | Ikeda Fumihiko | Matsuo Naoto Publishers : 応用物理学会 Date Issued : 1997-11
Creators : Fukumasa Osamu | Shinoda Masahiro Publishers : American Institute of Physics Date Issued : 1998-02
Isotope effects in an electron beam excited negative ion source
Review of Scientific Instruments Volume 67 Issue 3
Creators : Fukumasa Osamu | Nishimura Hideki | Sakiyama Satoshi | Kimoto Tatsushi Publishers : American Institute of Physics Date Issued : 1996-03
Recording characteristics of Co-γFe_2O_3 perpendicular magnetic recording media
Journal of Magnetics Society of Japan Volume 20 Issue 2
Creators : 安藤 貴之 | Yamamoto Setsuo | Kurisu Hiroki | 松浦 満 | 土井 孝紀 | 田万里 耕作 Publishers : 日本応用磁気学会 Date Issued : 1996
Pressure dependence of negative hydrogen ion production in a cesium seeded tandem volume source
Japanese journal of applied physics. Pt. 2, Letters Volume 35 Issue 11B
Creators : Fukumasa Osamu | Niitani Eiji Publishers : 応用物理学会 Date Issued : 1996-11
Particle simulation of the potential formation across the magnetic filter
Review of Scientific Instruments Volume 67 Issue 3
Creators : Naitou Hiroshi | Fukumasa Osamu | Sakachou Kouji Publishers : American Institute of Physics Date Issued : 1996-03
Creators : Abe Noritaka | Matsuda Haruhiko | Sugihara Yoshikazu | Kakehi Akikazu Publishers : Royal Society of Chemistry Date Issued : 1997
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