Epitaxial lateral overgrowth of thick semipolar {11$ \bar 2 $2} GaN by hydride vapor phase epitaxy
Physica Status Solidi (C) Current Topics in Solid State Physics Volume 11 Issue 3-4
Page 549-552
published_at 2014-04
Title
Epitaxial lateral overgrowth of thick semipolar {11$ \bar 2 $2} GaN by hydride vapor phase epitaxy
Creators
Hashimoto Yasuhiro
Creators
Furuya Hiroshi
Creators
Ueno Motohisa
Creator Keywords
GaN
HVPE
semipolar
ELO
crack
surface morphology
dislocation
Languages
eng
Resource Type
journal article
Publishers
WILEY-VCH Verlag GmbH & Co. KGaA
Date Issued
2014-04
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Schools
大学院理工学研究科（工学）