Okada Narihito

Affiliate Master Yamaguchi University

Epitaxial lateral overgrowth of thick semipolar {11$ \bar 2 $2} GaN by hydride vapor phase epitaxy

Physica Status Solidi (C) Current Topics in Solid State Physics Volume 11 Issue 3-4 Page 549-552

published_at 2014-04

Title

Epitaxial lateral overgrowth of thick semipolar {11$ \bar 2 $2} GaN by hydride vapor phase epitaxy

Creators Hashimoto Yasuhiro

Creators Furuya Hiroshi

Creators Ueno Motohisa

Creators Yamane Keisuke

Creators Okada Narihito

Creators Tadatomo Kazuyuki

Creator Keywords

GaN HVPE semipolar ELO crack surface morphology dislocation

Languages eng

Resource Type journal article

Publishers WILEY-VCH Verlag GmbH & Co. KGaA

Date Issued 2014-04

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]1610-1642

info:doi/10.1002/pssc.201300483

Schools 大学院理工学研究科（工学）