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keywordpoly-Si resource typedepartmental bulletin paper
publish year
2000 - 2004 2
keyword
crystal growth mechanism 2 poly-Si 2 ELA 1 SiN 1 Sin substrate 1 burst 1 excimer laser annealing 1 hydogens 1 hydrogen 1 stress 1
resource type
departmental bulletin paper 2
school
工学部 2
Result 2 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Characteristics of Recrystallized poly-Si Film Prepared by ELA of a-Si Deposited on SiO2 / SiN / Glass Using PE-CVD Method
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 52 Issue 1
Creators : Kawamoto Naoya | Abe Hisashi | Matsuo Naoto | Taguchi Ryouhei | Nouda Tomoyuki | Hamada Hiroki Publishers : 山口大学工学部 Date Issued : 2001-10
Crystal Growth Mode of Poly-Si Prepared by ELA : Relationship between the Grian Morphology and Hydrogens
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 53 Issue 1
Creators : Kawamoto Naoya | Matsuo Naoto Publishers : 山口大学工学部 Date Issued : 2002-10
Related Creatrors
Kawamoto Naoya 2
Related Journals
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 53 Issue 1 1 Memoirs of the Faculty of Engineering, Yamaguchi University Volume 52 Issue 1 1
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