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keywordhydrogen
publish year
2000 - 2004 1 2010 - 2014 2
keyword
hydrogen 3 ELA 1 SiN 1 crystal growth mechanism 1 current density 1 discharges (electric) 1 disk-shaped grain 1 excimer laser annealing 1 ion density 1 ionisation 1 nickel 1 plasma density 1 plasma sources 1 poly-Si 1 polycrystal silicon 1 radiation effects 1 stress 1 textured grain 1
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resource type
journal article 2 departmental bulletin paper 1
school
工学部 2 大学院理工学研究科（工学） 1
Result 3 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Hydrogen ions produced by plasma-assisted catalytic ionization using nickel grid
Physics of plasmas Volume 20 Issue 6
Creators : Oohara W. | Kawata K. | Hibino T. Publishers : American Institute of Physics Date Issued : 2013-06
Disk-Shaped crystal grain in poly-si film prepared by excimer laser annealing : Influence of hydrogen in a-Si Film
The Journal of the Japan Institute of Metals Volume 76 Issue 2
Creators : Heya Akira | Kawamoto Naoya | Matsuo Naoto Publishers : 日本金屬學會 Date Issued : 2012
Characteristics of Recrystallized poly-Si Film Prepared by ELA of a-Si Deposited on SiO2 / SiN / Glass Using PE-CVD Method
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 52 Issue 1
Creators : Kawamoto Naoya | Abe Hisashi | Matsuo Naoto | Taguchi Ryouhei | Nouda Tomoyuki | Hamada Hiroki Publishers : 山口大学工学部 Date Issued : 2001-10
Related Creatrors
Kawamoto Naoya 2 Oohara Wataru 1
Related Journals
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 52 Issue 1 1
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