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keywordcontrol of ECR plasma
publish year
1995 - 1999 1
keyword
control of ECR plasma 1 electron cyclotron resonance 1 etching plasma 1 microwave electric field 1 uniform plasma 1 wave propagation 1
resource type
journal article 1
school
大学院理工学研究科（工学） 1
Result 1 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Measurement of a three-dimensional distribution of microwave electric field in electron cyclotron resonance plasmas
Japanese journal of applied physics. Pt. 1, Regular papers & short notes Volume 36 Issue 7B
Creators : Furuse Muneo | Tamura Hitoshi | Watanabe Seiichi | Fukumasa Osamu Publishers : 応用物理学会 Date Issued : 1997-07
Related Creatrors
Fukumasa Osamu 1
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