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Disk-Shaped crystal grain in poly-si film prepared by excimer laser annealing : Influence of hydrogen in a-Si Film

The Journal of the Japan Institute of Metals Volume 76 Issue 2 Page 134-138
published_at 2012
Title
エキシマレーザ・アニールで作製した多結晶シリコン膜のディスク状結晶粒 : a-Si膜中の水素の影響
Disk-Shaped crystal grain in poly-si film prepared by excimer laser annealing : Influence of hydrogen in a-Si Film
Creators Heya Akira
Creators Kawamoto Naoya
Creators Matsuo Naoto
Creator Keywords
disk-shaped grain textured grain hydrogen excimer laser annealing polycrystal silicon
Languages jpn
Resource Type journal article
Publishers 日本金屬學會
Date Issued 2012
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]0021-4876
[ISSN]1880-6880
[NCID]AN00062446
[NCID]AA1204177X
info:doi/10.2320/jinstmet.76.134
[isVersionOf] [URI]http://www.jstage.jst.go.jp/browse/jinstmet/_vols/-char/ja
Schools 工学部