Transparent Conducting Films of Cd-Sn and In-Sn Oxide Prepared by Thermal Oxidation

熱酸化法による金属酸化物透明導電膜

Transparent Conducting Films of Cd-Sn and In-Sn Oxide Prepared by Thermal Oxidation

Creators Nakao Mitsunori

Creators Miyata Naoyuki

Creators Miyake Kiyoshi

Cd-Sn or In-Sn oxide were prepared by thermal oxidation of as-sputtered films from a Cd-Sn or In-Sn alloy target in an Ar-O_2 atmosphere. The films were transparent in the visible region and were electrically conductive. The optical transmission and electrical resistance were examined as a function of the thermal oxidation condition, such as temperatures and time. The lowest resistivity of Cd-Sn oxide and In-Sn oxide was 5.1×(10)^<-4>Ω・cm and 5.4×(10)^<-4>Ω・cm, respectively. The highest average optical transmission of both oxide films was about 90% and 93% in the visible region, respectively.

[ISSN]0372-7661

[NCID]AN00244228