Disk-Shaped crystal grain in poly-si film prepared by excimer laser annealing : Influence of hydrogen in a-Si Film
The Journal of the Japan Institute of Metals Volume 76 Issue 2
Page 134-138
published_at 2012
Title
エキシマレーザ・アニールで作製した多結晶シリコン膜のディスク状結晶粒 : a-Si膜中の水素の影響
Disk-Shaped crystal grain in poly-si film prepared by excimer laser annealing : Influence of hydrogen in a-Si Film
Creator Keywords
disk-shaped grain
textured grain
hydrogen
excimer laser annealing
polycrystal silicon
Languages
jpn
Resource Type
journal article
Publishers
日本金屬學會
Date Issued
2012
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[ISSN]0021-4876
[ISSN]1880-6880
[NCID]AN00062446
[NCID]AA1204177X
[isVersionOf]
[URI]http://www.jstage.jst.go.jp/browse/jinstmet/_vols/-char/ja
Schools
工学部