磁気フィルターによるバケット型プラズマ源内のプラズマパラメータの制御

Controll of Plasma Parameters in a Magnetically Filtered Multicusp Source

Creators Shigeyama Naoki

Creators Mizumo Hitoshi

Creators Watanabe Kenji

Creators Sakiyama Satoshi

Creators Fukumasa Osamu

The technique to control plasma parameters spatially, especially energy distribution and density of electrons, is studied experimentally with magnetically filtered multicusp source. We have found that plasma parameters vary across the filter abruptly. Namely, magnetic filter field devides plasma volume into two regions, i.e. source plasma region and diffused plasma region. The source plasma is high density and high temperature plasma with fast electrons. The diffused plasma is low density and low temperature plasma, because filter field allows the passage of only low-energy electrons to this region. For different two gas species (H_2,Ar) and for various gas pressures (0.6&acd

[ISSN]0372-7661

[NCID]AN00244228