Controll of Plasma Parameters in a Magnetically Filtered Multicusp Source
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 40 Issue 1
Page 213-222
published_at 1989-10
Title
磁気フィルターによるバケット型プラズマ源内のプラズマパラメータの制御
Controll of Plasma Parameters in a Magnetically Filtered Multicusp Source
Creators
Shigeyama Naoki
Creators
Mizumo Hitoshi
Creators
Watanabe Kenji
Creators
Fukumasa Osamu
Source Identifiers
The technique to control plasma parameters spatially, especially energy distribution and density of electrons, is studied experimentally with magnetically filtered multicusp source. We have found that plasma parameters vary across the filter abruptly. Namely, magnetic filter field devides plasma volume into two regions, i.e. source plasma region and diffused plasma region. The source plasma is high density and high temperature plasma with fast electrons. The diffused plasma is low density and low temperature plasma, because filter field allows the passage of only low-energy electrons to this region. For different two gas species (H_2,Ar) and for various gas pressures (0.6&acd
Languages
jpn
Resource Type
departmental bulletin paper
Publishers
山口大学工学部
Date Issued
1989-10
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]0372-7661
[NCID]AN00244228
Schools
工学部