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Controll of Plasma Parameters in a Magnetically Filtered Multicusp Source

Memoirs of the Faculty of Engineering, Yamaguchi University Volume 40 Issue 1 Page 213-222
published_at 1989-10
KJ00000156781.pdf
[fulltext] 577 KB
Title
磁気フィルターによるバケット型プラズマ源内のプラズマパラメータの制御
Controll of Plasma Parameters in a Magnetically Filtered Multicusp Source
Creators Shigeyama Naoki
Creators Mizumo Hitoshi
Creators Watanabe Kenji
Creators Sakiyama Satoshi
Creators Fukumasa Osamu
Source Identifiers
The technique to control plasma parameters spatially, especially energy distribution and density of electrons, is studied experimentally with magnetically filtered multicusp source. We have found that plasma parameters vary across the filter abruptly. Namely, magnetic filter field devides plasma volume into two regions, i.e. source plasma region and diffused plasma region. The source plasma is high density and high temperature plasma with fast electrons. The diffused plasma is low density and low temperature plasma, because filter field allows the passage of only low-energy electrons to this region. For different two gas species (H_2,Ar) and for various gas pressures (0.6&acd
Subjects
電気電子工学 ( Other)
Languages jpn
Resource Type departmental bulletin paper
Publishers 山口大学工学部
Date Issued 1989-10
File Version Version of Record
Access Rights open access
Relations
[ISSN]0372-7661
[NCID]AN00244228
Schools 工学部