Transparent Conducting Films of Cd-Sn and In-Sn Oxide Prepared by Thermal Oxidation
Memoirs of the Faculty of Engineering, Yamaguchi University Volume 30 Issue 2
Page 325-330
published_at 1980
Title
熱酸化法による金属酸化物透明導電膜
Transparent Conducting Films of Cd-Sn and In-Sn Oxide Prepared by Thermal Oxidation
Creators
Nakao Mitsunori
Creators
Miyata Naoyuki
Creators
Miyake Kiyoshi
Source Identifiers
Cd-Sn or In-Sn oxide were prepared by thermal oxidation of as-sputtered films from a Cd-Sn or In-Sn alloy target in an Ar-O_2 atmosphere. The films were transparent in the visible region and were electrically conductive. The optical transmission and electrical resistance were examined as a function of the thermal oxidation condition, such as temperatures and time. The lowest resistivity of Cd-Sn oxide and In-Sn oxide was 5.1×(10)^<-4>Ω・cm and 5.4×(10)^<-4>Ω・cm, respectively. The highest average optical transmission of both oxide films was about 90% and 93% in the visible region, respectively.
Languages
jpn
Resource Type
departmental bulletin paper
Publishers
山口大学工学部
Date Issued
1980
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]0372-7661
[NCID]AN00244228
Schools
工学部