コンテンツメニュー
keywordrotary machinery
publish year
1990 - 1994 1 1995 - 1999 2
keyword
crystal ingot 3 deflection 3 rotary machinery 3 silicon-wafer slicer 3 PD control 1 air film stiffness 1 control forces 1 transient response 1
resource type
journal article 3
school
大学院理工学研究科（工学） 3
Result 3 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Active flatness control of a large-scale silicon-wafer slicer cutting a crystal ingot : feedback vibration controller for ID sawblade
Transactions of the Japan Society of Mechanical Engineers. C Volume 61 Issue 587
Creators : Masui Keijiro | Chonan Seiji | Kai Fumitaka | Jiang Zhong-Wei Publishers : 日本機械学会 Date Issued : 1995-07
Active flatness control of a large-scale silicon-wafer slicer cutting a crystal ingot : effect on the deflection control of the air film stiffness between the blade and the ingot
Transactions of the Japan Society of Mechanical Engineers. C Volume 61 Issue 582
Creators : Masui Keijiro | Chonan Seiji | Jiang Zhong-Wei Publishers : 日本機械学会 Date Issued : 1995-02
Deflection control of a large-scale silicon-wafer slicer cutting a crystal ingot
Transactions of the Japan Society of Mechanical Engineers. C Volume 60 Issue 570
Creators : Chonan Seiji | Jiang Zhongwei | Masui Keijiro Publishers : 日本機械学会 Date Issued : 1994-02
Related Creatrors
Jiang Zhongwei 3
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