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keywordreactive ECR sputtering
publish year
2000 - 2004 5
keyword
reactive ECR sputtering 5 Ni-Zn ferrite thin films 2 high-rate deposition 2 low temperature 2 perpendicular magnetic recording 2 recording media 2 Co-containing ferrite thin film media 1 Co-containing ferrite thin-film 1 Ni-Zn ferrite thin-film 1 backlayer 1 perpendicular magnetic anisotropy 1 perpendicular magnetic recording media 1 plasma oxidation 1
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resource type
journal article 5
school
大学院理工学研究科（工学） 5
Result 5 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Low temperature sputter-deposition of Ni-Zn ferrite thin-films using electron-cyclotron-resonance microwave plasma
Transactions of the Materials Research Society of Japan Volume 28 Issue 4
Creators : Wada H. | Yamamoto S. | Kurisu H. | Matsuura M. | Shimosato Y. Publishers : Materials Resarch society of Japan Date Issued : 2003
Co-containing ferrite thin-film disk prepared by reactive sputtering method
粉体および粉末冶金 Volume 48 Issue 8
Creators : Hirata Kei | Yamamoto Setsuo | Kurisu Hiroki | Matsuura Mitsuru | Doi Takanori | Tamari Kousaku Publishers : 粉体粉末冶金協会 Date Issued : 2001
Reactive ECR-Sputter-Deposition of Ni-Zn ferrite thin-films for backlayer of PMR media
IEICE Transactions on Electronics Volume E86-C Issue 9
Creators : Wada Hirofumi | Yamamoto Setsuo | Kurisu Hiroki | Matsuura Mitsuru Publishers : 電子情報通信学会 Date Issued : 2003-09
Plasma oxidation effects of co-containing ferrite thin film media deposited by reactive ECR sputtering
Journal of Magnetics Society of Japan Volume 26 Issue 4
Creators : Yamamoto Setsuo | 平田 京 | 和田 宏文 | Kurisu Hiroki | 松浦 満 | 土井 孝紀 | 田万里 耕作 Publishers : 日本応用磁気学会 Date Issued : 2002
Low-temperature sputter-deposition of Ni-Zn ferrite thin films using electron-cyclotron-resonance microwave plasma
Journal of Magnetics Society of Japan Volume 27 Issue 4
Creators : Yamamoto Setsuo | 和田 宏文 | Kurisu Hiroki | 松浦 満 | 下里 義博 Publishers : 日本応用磁気学会 Date Issued : 2003
Related Creatrors
Yamamoto Setsuo 5 Kurisu Hiroki 5
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