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keywordplasma CVD
publish year
1995 - 1999 1
keyword
electron energy distribution function 1 magnetic filter 1 multi cusp plasma source 1 plasma CVD 1 reactive plasmas 1 spatial control 1
resource type
journal article 1
school
大学院理工学研究科（工学） 1
Result 1 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Relationship between control of reactive plasmas with magnetic filter and formation of thin films
Japanese journal of applied physics. Pt. 1, Regular papers & short notes Volume 36 Issue 7B
Creators : Fukumasa Osamu | Tauchi Yasushi | Sakiyama Satoshi Publishers : 応用物理学会 Date Issued : 1997-07
Related Creatrors
Sakiyama Satoshi 1 Tauchi Yasushi 1 Fukumasa Osamu 1
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