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Characteristics of Recrystallized poly-Si Film Prepared by ELA of a-Si Deposited on SiO2 / SiN / Glass Using PE-CVD Method

Memoirs of the Faculty of Engineering, Yamaguchi University Volume 52 Issue 1

Creators : Kawamoto Naoya | Abe Hisashi | Matsuo Naoto | Taguchi Ryouhei | Nouda Tomoyuki | Hamada Hiroki Publishers : 山口大学工学部 Date Issued : 2001-10