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publish year2010 - 2014 keywordexcimer laser annealing school工学部
publish year
2010 - 2014 1
keyword
disk-shaped grain 1 excimer laser annealing 1 hydrogen 1 polycrystal silicon 1 textured grain 1
resource type
journal article 1
school
工学部 1
Result 1 Items
Id (<span class="translation_missing" title="translation missing: en.view.desc">Desc</span>)
Disk-Shaped crystal grain in poly-si film prepared by excimer laser annealing : Influence of hydrogen in a-Si Film
The Journal of the Japan Institute of Metals Volume 76 Issue 2
Creators : Heya Akira | Kawamoto Naoya | Matsuo Naoto Publishers : 日本金屬學會 Date Issued : 2012
Related Creatrors
Kawamoto Naoya 1
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