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Pulse modulation for plasma parameter control and optimization of volume H- ion source

Review of Scientific Instruments Volume 69 Issue 2 Page 938-940
published_at 1998-02
2007010082.pdf
[fulltext] 1.55 MB
Title
Pulse modulation for plasma parameter control and optimization of volume H- ion source
Creators Fukumasa Osamu
Creators Shinoda Masahiro
Pulse modulation of a negative ion volume source was investigated, both with and without a magnetic filter for various operating conditions. Without a magnetic filter, afterglow negative ion peak is observed, which was reported by some authors. Variation of afterglow peak was discussed as a function of gas pressure, discharge power, and extraction voltage. With a magnetic filter, on the other hand, there is no remarkable afterglow peak and the negative ion current during the discharge pulse exceeds all the afterglow currents for the present experimental conditions. Finally, comparison of afterglow negative ion peak (no magnetic filter case, i.e., temporal filter) with negative ion current during the discharge pulse (with magnetic filter case, i.e., spatial filter) was discussed.
Subjects
電気電子工学 ( Other)
Languages eng
Resource Type journal article
Publishers American Institute of Physics
Date Issued 1998-02
File Version Version of Record
Access Rights open access
Relations
[ISSN]0034-6748
https://doi.org/10.1063/1.1148597
[isPartOf] [URI]http://rsi.aip.org/rsi/
Schools 大学院理工学研究科(工学)