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Effects of permanent magnet arrangements and antenna locations on the generation of multicusp electron cyclotron resonance plasma

Review of Scientific Instruments Volume 63 Issue 1 Page 21-30
published_at 1992-01
2007010073.pdf
[fulltext] 7.52 MB
Title
Effects of permanent magnet arrangements and antenna locations on the generation of multicusp electron cyclotron resonance plasma
Creators Namura Takashi
Creators Arikata Ichio
Creators Fukumasa Osamu
Creators Kubo Makoto
Creators Itatani Ryohei
A comparative study on the generation of 2.45-GHz multicusp electron cyclotron resonance (ECR) plasma is performed. Looped cusp structures such as the ring-cusp give a low-power and low-pressure ignition, and vice versa, indicating an importance to keep the electron trajetory of gradient-B drift motion inside the chamber even in the case of ECR plasmas. The importance of the antenna location in such multicusp fields is elucidated by comparison in two cases of the axial antenna located in the weak magnetic field region, generating a hydrogen plasma of limited density (ne<7.4×10 10cm-3), and a radial antenna located in the strong magnetic field region, generating an overdense plasma (ne~2×10 11cm-3).
Subjects
電気電子工学 ( Other)
Languages eng
Resource Type journal article
Publishers American Institute of Physics
Date Issued 1992-01
File Version Version of Record
Access Rights open access
Relations
[ISSN]0034-6748
info:doi/10.1063/1.1142961
[isVersionOf] [URI]http://rsi.aip.org/rsi/
Schools 大学院理工学研究科(工学)