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A plasma reactor based on the forced constricted type dc plasma jet and its application to thermal plasma processing in low pressure

Review of Scientific Instruments Volume 63 Issue 4 Page 2408-2410
published_at 1992-04
2007010074.pdf
[fulltext] 2.89 MB
Title
A plasma reactor based on the forced constricted type dc plasma jet and its application to thermal plasma processing in low pressure
Creators Sakiyama Satoshi
Creators Hirabaru Tetuya
Creators Fukumasa Osamu
A reactor consisting of a forced constricted type dc plasma jet generator and a feed ring has been developed. In order to demonstrate the application feasibility of this reactor to low pressure plasma processing, the characteristics of the forced constricted arc in low pressure, and production of ultrafine particles of refractory materials (Al2O3, ZrC, TiC) are studied.
Subjects
電気電子工学 ( Other)
Languages eng
Resource Type journal article
Publishers American Institute of Physics
Date Issued 1992-04
File Version Version of Record
Access Rights open access
Relations
[ISSN]0034-6748
https://doi.org/10.1063/1.1142945
[isPartOf] [URI]http://rsi.aip.org/rsi/
Schools 大学院理工学研究科(工学)