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Fabrication of Co-Cr pependicular magnetic recording media by bias sputtering

Journal of Magnetics Society of Japan Volume 17 Issue S2(Supplement) Page 231-236
published_at 1993
Title
バイアス・スパッタ法によるCo-Cr垂直磁気記録媒体の作製
Fabrication of Co-Cr pependicular magnetic recording media by bias sputtering
Creators Yamamoto Setsuo
Creators 松本 隆之
Creators Kurisu Hiroki
Creators 松浦 満
Creator Keywords
perpendicular magnetic recording Co-Cr sputtering bias
Co-Cr perpendicular magnetic recording media were fabricated by using an RF diode sputtering apparatus with applying DC bias voltage to a substrate holder. As the DC bias voltage increases, perpendicular orientation of cobalt c-axis deteriorates, and perpendicular magnetic anisotropy decreases. At the proper bias voltage, high perpendicular coercivity is achieved by moderating the influence of impurity gas, and consequently the high reproduced voltage is obtained at high-densities.
Languages jpn
Resource Type journal article
Publishers 日本応用磁気学会
Date Issued 1993
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]0285-0192
[NCID]AN0031390X
[isVersionOf] [URI]http://www.wdc-jp.com/msj/journal/index.html
Schools 大学院理工学研究科(工学)