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Numerical simulation of hydrogen ion species in the steady-state plasma of a low-pressure ion source

Journal of physics. D, Applied physics Volume 18 Issue 12 Page 2433-2449
published_at 1985-12
Title
Numerical simulation of hydrogen ion species in the steady-state plasma of a low-pressure ion source
Creators Fukumasa Osamu
Creators Itatani Ryohei
Creators Saeki Setsuo
Ion species ratios in a hydrogen plasma are calculated systematically as a function of plasma parameters, i.e. the electron density, the electron temperature the pressure of hydrogen gas and the plasma volume. Furthermore, in the present analysis, the recombination factor for hydrogen atoms at the wall surface of a vacuum vessel is treated as another plasma parameter. The most significant point is that ion species ratios depend strongly not only on plasma parameters but also on the recombination factor. The proton ratio increases with decreasing the value of the recombination factor. Primary electrons also play an important role for ion species ratios, and the presence of primary electrons causes the proton ratio to decrease.
Languages eng
Resource Type journal article
Publishers Institute of Physics
Date Issued 1985-12
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]0022-3727
[NCID]AA00704905
https://doi.org/10.1088/0022-3727/18/12/012
[isVersionOf] [URI]http://www.iop.org/EJ/journal/0022-3727
Schools 大学院理工学研究科(工学)