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Preparation of Highly Sinter-resistant Materials Si₃N₄ and AlN by Direct Metal Nitridation Method : Especially, High Qualification by Morphology Control and Formation Mechanism

学位論文及び学位審査要旨(創科博甲143号).pdf
[abstract] 2.24 MB
論文全文(創科博甲143号).pdf
[fulltext] 26.1 MB
Title
金属直接窒化法による難焼結性材料Si_3N_4, AlNの作製 : 特に, 形態制御と生成機構による高品質化
Preparation of Highly Sinter-resistant Materials Si₃N₄ and AlN by Direct Metal Nitridation Method : Especially, High Qualification by Morphology Control and Formation Mechanism
Degree 博士(工学) Dissertation Number 創科博甲第143号 (2024-03-18)
Degree Grantors Yamaguchi University
[kakenhi]15501 grid.268397.1
Creators 中村 美幸
Languages jpn
Resource Type doctoral thesis
File Version Version of Record
Access Rights open access