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Single-crystal diamond tools formed using a focused ion beam : tool life enhancement via heat treatment

Diamond and related materials Volume 49 Page 14-18
published_at 2014-10
Title
Single-crystal diamond tools formed using a focused ion beam : tool life enhancement via heat treatment
Creators Kawasegi Noritaka
Creators Ozaki Kazuma
Creators Morita Noboru
Creators Nishimura Kazuhito
Creators Sasaoka Hideki
Creator Keywords
Diamond Ultra-precision machining Single-crystal diamond tool Focused ion beam Heat treatment Etching Amorphous Tool life
Languages eng
Resource Type journal article
Publishers Elsevier
Date Issued 2014-10
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]0925-9635
[NCID]AA10819710
info:doi/10.1016/j.diamond.2014.07.013
[isVersionOf] [URI]http://www.sciencedirect.com/science/journal/09259635
Schools 大学院理工学研究科(工学)