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Thermal decomposition of tetrabromosilane and deposition of crystalline silicon

Materials Science in Semiconductor Processing Volume 23 Page 93-97
published_at 2014-07
Title
Thermal decomposition of tetrabromosilane and deposition of crystalline silicon
Creators Nakayama Masaharu
Creators Miyamoto Seiji
Creators Ogawa Takuro
Creators Osae Shogo
Creators Tomono Kazuaki
Creators Sumimoto Michinori
Creators Sakata Yoshihisa
Creators Komatsu Ryuichi
Creator Keywords
SiBr_4 Thermochemical decomposition Si deposition Flow reactor
Languages eng
Resource Type journal article
Publishers Elsevier Science
Date Issued 2014-07
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]1369-8001
[NCID]AA11350145
info:doi/10.1016/j.mssp.2014.02.045
[isVersionOf] [URI]http://www.sciencedirect.com/science/journal/13698001
Schools 大学院理工学研究科(工学)