Spatial inhomogeneity of aluminum content in air-bridged lateral epitaxially grown AlGaN ternary alloy films probed by cross-sectional scanning near-field optical microscopy
Japanese journal of applied physics Volume 51 Issue 3
Page 035604-
published_at 2012-03
Title
Spatial inhomogeneity of aluminum content in air-bridged lateral epitaxially grown AlGaN ternary alloy films probed by cross-sectional scanning near-field optical microscopy
Creators
Ishibashi Akihiko
Creators
Murotani Hideaki
Creators
Yokogawa Toshiya
Languages
eng
Resource Type
journal article
Publishers
Japan Society of Applied Physics through the Institute of Pure and Applied Physics
Date Issued
2012-03
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[ISSN]0021-4922
[NCID]AA12295836
[isVersionOf]
[NAID]http://ci.nii.ac.jp/naid/40019199809
[isVersionOf]
[URI]http://jjap.jsap.jp
Schools
大学院理工学研究科（工学）