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Synthesis of ITO powder by dry process and lifetime characteristics of the ITO target fabricated with its powder

The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and Systems Society Volume 132 Issue 1 Page 77-82+8
published_at 2012
Title
ドライプロセスによるITO粉の合成とそれを用いて作製したITOターゲットのライフ特性
Synthesis of ITO powder by dry process and lifetime characteristics of the ITO target fabricated with its powder
Creators Takahashi S.
Creators Itoh H.
Creators Komatsu R.
Creator Keywords
ITO スパッタリングターゲット ターゲットライフ 乾式合成 炭素濃度 ITO粉 Sputtering target Target lifetime Dry synthesis Carbon concentration ITO powder
Languages jpn
Resource Type journal article
Publishers 電気学会
Date Issued 2012
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]0385-4221
[NCID]AN10065950
info:doi/10.1541/ieejeiss.132.77
[isVersionOf] [URI]http://www.scopus.com/inward/record.url?eid=2-s2.0-84856764988&partnerID=40&md5=9da99a00e217f4b952ac1f94e5af9fa2
Schools 大学院理工学研究科(工学)