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Vibration and deflection of a silicon-wafer slicer cutting the crystal ingot

Transactions of the ASME. Journal of vibration and acoustics Volume 115 Issue 4 Page 529-534
published_at 1993-10
Title
Vibration and deflection of a silicon-wafer slicer cutting the crystal ingot
Creators Chonan S.
Creators Jiang Z.W.
Creators Yuki Y.
Languages eng
Resource Type journal article
Publishers American Society of Mechanical Engineers
Date Issued 1993-10
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]1048-9002
[NCID]AA10745862
info:doi/10.1115/1.2930382
[isVersionOf] [URI]http://scitation.aip.org/ASMEJournals/VibrationAcoustics/
Schools 大学院理工学研究科(工学)