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Low temperature sputter-deposition of Ni-Zn ferrite thin-films using electron-cyclotron-resonance microwave plasma

Transactions of the Materials Research Society of Japan Volume 28 Issue 4 Page 1105-1108
published_at 2003
2009010227.pdf
[fulltext] 2.22 MB
Title
Low temperature sputter-deposition of Ni-Zn ferrite thin-films using electron-cyclotron-resonance microwave plasma
Creators Wada H.
Creators Yamamoto S.
Creators Kurisu H.
Creators Matsuura M.
Creators Shimosato Y.
Creator Keywords
Ni-Zn ferrite thin films reactive ECR sputtering high-rate deposition low temperature
Languages eng
Resource Type journal article
Publishers Materials Resarch society of Japan
Date Issued 2003
Rights
(C)The Materials Resarch society of Japan(日本MRS)()
File Version Version of Record
Access Rights open access
Relations
[ISSN]1382-3469
[NCID]AA10850652
Schools 大学院理工学研究科(工学)