High rate and low-temperature sputter-deposition of Ni-Zn ferrite thin-films
Transactions of the Materials Research Society of Japan Volume 29 Issue 4
Page 1631-1634
published_at 2004
Title
High rate and low-temperature sputter-deposition of Ni-Zn ferrite thin-films
Creators
Ogita Tomoharu
Creators
Isida Gen
Creators
Matsuura Mitsuru
Creators
Shimosato Yoshihiro
Creators
Okada Shigenobu
Creator Keywords
ECR sputtering
Ni-Zn ferrite
ferrite thin-film
high deposition rate
low temperature sputtering
Languages
eng
Resource Type
journal article
Publishers
Materials Resarch society of Japan
Date Issued
2004
Rights
(C)The Materials Resarch society of Japan(日本MRS)()
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]1382-3469
[NCID]AA10850652
Schools
大学院理工学研究科（工学）