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High rate and low-temperature sputter-deposition of Ni-Zn ferrite thin-films

Transactions of the Materials Research Society of Japan Volume 29 Issue 4 Page 1631-1634
published_at 2004
2009010229.pdf
[fulltext] 2.24 MB
Title
High rate and low-temperature sputter-deposition of Ni-Zn ferrite thin-films
Creators Ogita Tomoharu
Creators Yamamoto Setsuo
Creators Isida Gen
Creators Kurisu Hiroki
Creators Matsuura Mitsuru
Creators Shimosato Yoshihiro
Creators Okada Shigenobu
Creator Keywords
ECR sputtering Ni-Zn ferrite ferrite thin-film high deposition rate low temperature sputtering
Languages eng
Resource Type journal article
Publishers Materials Resarch society of Japan
Date Issued 2004
Rights
(C)The Materials Resarch society of Japan(日本MRS)()
File Version Version of Record
Access Rights open access
Relations
[ISSN]1382-3469
[NCID]AA10850652
Schools 大学院理工学研究科(工学)