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Some Electron Temperature Measurements for a Low Pressure Discharge Tube by means of Probe Methods

Memoirs of the Faculty of Engineering, Yamaguchi University Volume 24 Issue 2 Page 31-38
published_at 1973
KJ00000156029.pdf
[fulltext] 481 KB
Title
低気圧放電管の探針法による電子温度測定
Some Electron Temperature Measurements for a Low Pressure Discharge Tube by means of Probe Methods
Creators Ebihara Kenji
Creators Imajo Yoshio
Source Identifiers
There are many methods such as a probe method, aspectroscopic method, a microwave method to know the low pressure plasma properties. Especially, a probe method is mainly used by the merits which this method is able to measure directly various parameters of the plasma (electron temperature and electron density) and to operate easier than the other methods. A few works have been carried out for the glow discharge in a low pressure (10 mtorr, Ar gas), so that this experiment has been done for the purpose of expounding the characteristics of the low gas pressure tube by using a single probe method and a double probe method. As the result, it was obtained as follows. 1) The negative glow has the greater part of the discharging column and positive column has not more than one third of the discharge column. 2) In the case of measuring the characteristics of a discharge tube which is applied more than 1 kV, the double probe method is more suitable than the single probe method. 3) A negative glow has the Maxwellian distribution for both the normal glow discharge and an initial state of the abnormal glow discharge. 4) The electron temperature, the electron density and electric conductivity is nearly equal to 5×10^4°K, 8×10^8cm^<-3> and 22.4&mho
Subjects
電気電子工学 ( Other)
Languages jpn
Resource Type departmental bulletin paper
Publishers 山口大学工学部
Date Issued 1973
File Version Version of Record
Access Rights open access
Relations
[ISSN]0372-7661
[NCID]AN00244228
Schools 工学部