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Spatial control of electron energy distribution function in a magnetically filtered multicusp plasma source

Japanese journal of applied physics. Pt. 2, Letters Volume 30 Issue 6A Page L1063-L1065
published_at 1991-06
Title
Spatial control of electron energy distribution function in a magnetically filtered multicusp plasma source
Creators Fukumasa Osamu
Creators Naitou Hiroshi
Creators Sakiyama Satoshi
Using a movable magnetic filter, a technique to control plasma parameters spatially has been investigated in a multicusp plasma source. At any filter position, plasma parameters change steeply across the magnetic filter. Mainly, a multicusp plasma source is divided into two parts, i.e., a source plasma region with energetic electrons and a diffused plasma region. In the latter region, the high-energy component of electrons is eliminated thoroughly by the localized magnetic field of the filter.
Languages eng
Resource Type journal article
Publishers 応用物理学会
Date Issued 1991-06
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]0021-4922
[NCID]AA10650595
info:doi/10.1143/JJAP.30.L1063
[isVersionOf] [URI]http://www.ipap.jp/jjap/index.htm
Schools 大学院理工学研究科(工学)