A plasma reactor based on the forced constricted type dc plasma jet and its application to thermal plasma processing in low pressure
Review of Scientific Instruments Volume 63 Issue 4
Page 2408-2410
published_at 1992-04
Title
A plasma reactor based on the forced constricted type dc plasma jet and its application to thermal plasma processing in low pressure
A reactor consisting of a forced constricted type dc plasma jet generator and a feed ring has been developed. In order to demonstrate the application feasibility of this reactor to low pressure plasma processing, the characteristics of the forced constricted arc in low pressure, and production of ultrafine particles of refractory materials (Al2O3, ZrC, TiC) are studied.
Languages
eng
Resource Type
journal article
Publishers
American Institute of Physics
Date Issued
1992-04
File Version
Version of Record
Access Rights
open access
Schools
大学院理工学研究科（工学）