Sasaoka Hideki

Affiliate Master Yamaguchi University

Single-crystal diamond tools formed using a focused ion beam : tool life enhancement via heat treatment

Diamond and related materials Volume 49 Page 14-18

published_at 2014-10

Title

Single-crystal diamond tools formed using a focused ion beam : tool life enhancement via heat treatment

Creators Kawasegi Noritaka

Creators Ozaki Kazuma

Creators Morita Noboru

Creators Nishimura Kazuhito

Creators Sasaoka Hideki

Creator Keywords

Diamond Ultra-precision machining Single-crystal diamond tool Focused ion beam Heat treatment Etching Amorphous Tool life

Languages eng

Resource Type journal article

Publishers Elsevier

Date Issued 2014-10

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]0925-9635

[NCID]AA10819710

info:doi/10.1016/j.diamond.2014.07.013

[isVersionOf] [URI]http://www.sciencedirect.com/science/journal/09259635

Schools 大学院理工学研究科（工学）