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Tomono Kazuaki

Affiliate Master Yamaguchi University

Investigations on hydrobromination of silicon in the presence of silicon carbide abrasives as a purification route of kerf loss waste

Separation and purification technology Volume 103 Page 109-113
published_at 2013-01-15
Title
Investigations on hydrobromination of silicon in the presence of silicon carbide abrasives as a purification route of kerf loss waste
Creators Tomono Kazuaki
Creators Furuya Hirotoshi
Creators Miyamoto Seiji
Creators Okamura Yuki
Creators Sumimoto Michinori
Creators Sakata Yoshihisa
Creators Komatsu Ryuichi
Creators Nakayama Masaharu
Creator Keywords
silicon silicon carbide kerf loss hydrobromination gas chromatography
Languages eng
Resource Type journal article
Publishers Elsevie Elsevier Sciencer
Date Issued 2013-01-15
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]1383-5866
[NCID]AA11136087
[NCID]AA11529807
info:doi/10.1016/j.seppur.2012.10.031
[isVersionOf] [URI]http://www.sciencedirect.com/science/journal/13835866
Schools 大学院理工学研究科(工学)