Itoh Hironori

Affiliate Master Yamaguchi University

Synthesis of ITO powder by dry process and lifetime characteristics of the ITO target fabricated with its powder

The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and Systems Society Volume 132 Issue 1 Page 77-82+8

published_at 2012

Title

ドライプロセスによるITO粉の合成とそれを用いて作製したITOターゲットのライフ特性

Synthesis of ITO powder by dry process and lifetime characteristics of the ITO target fabricated with its powder

Creators Takahashi S.

Creators Itoh H.

Creators Komatsu R.

Creator Keywords

ITO スパッタリングターゲットターゲットライフ乾式合成炭素濃度 ITO粉 Sputtering target Target lifetime Dry synthesis Carbon concentration ITO powder

Languages jpn

Resource Type journal article

Publishers 電気学会

Date Issued 2012

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]0385-4221

[NCID]AN10065950

info:doi/10.1541/ieejeiss.132.77

[isVersionOf] [URI]http://www.scopus.com/inward/record.url?eid=2-s2.0-84856764988&partnerID=40&md5=9da99a00e217f4b952ac1f94e5af9fa2

Schools 大学院理工学研究科（工学）