Pulse modulation for plasma parameter control and optimization of volume H- ion source

Creators Fukumasa Osamu

Creators Shinoda Masahiro

Pulse modulation of a negative ion volume source was investigated, both with and without a magnetic filter for various operating conditions. Without a magnetic filter, afterglow negative ion peak is observed, which was reported by some authors. Variation of afterglow peak was discussed as a function of gas pressure, discharge power, and extraction voltage. With a magnetic filter, on the other hand, there is no remarkable afterglow peak and the negative ion current during the discharge pulse exceeds all the afterglow currents for the present experimental conditions. Finally, comparison of afterglow negative ion peak (no magnetic filter case, i.e., temporal filter) with negative ion current during the discharge pulse (with magnetic filter case, i.e., spatial filter) was discussed.

[ISSN]0034-6748

https://doi.org/10.1063/1.1148597

[isPartOf] [URI]http://rsi.aip.org/rsi/