ラングミュアプローブ特性からのディジタル処理によるプラズマパラメータの自動計測

Automatic measurement of plasma parameters by digital data processing from langmuir probe characteristics

Creators Ohba Takumi

Creators Shinoda Yuuichi

Creators Sakiyama Satoshi

Creators Fukumasa Osamu

We have developed an automatic measurement system of plasma parameters (i.e. electron temperature Te, space potential Vs, floating potential Vf, electron density Ne) including the electron energy distribution function (EEDF) by means of the digital data processing from Langmuir probe characteristics. In order to overcome the problems of conventional probe analysis, this system has an efficient algorithm not only for smoothing the Vp-Ip characteristics but also for determining Te reasonably. It is also confirmed experimentally that this system enables us to determine plasma parameters without artificial errors in a rapid time.

[ISSN]0372-7661

[NCID]AN00244228