Fukumasa Osamu
Affiliate Master
Yamaguchi University
Negative ion volume production in electron cyclotron resonance hydrogen plasmas
Japanese journal of applied physics. Pt. 1, Regular papers & short notes Volume 38 Issue 7B
Page 4581-4585
published_at 1999-07
Title
Negative ion volume production in electron cyclotron resonance hydrogen plasmas
Creators
Matsumori Masanori
Creator Keywords
negative ion source
NBI heating
ECR plasma
H^- production
magnetic filter
Production and control of electron cyclotron resonance (ECR) plasmas for negative ion sources have been studied. A new production method using permanent magnets is proposed as one possibility for generating a large-diameter high-density uniform microwave plasma. The microwave power is launched by an annular slot antenna into the circumference of a chamber with a ring-cusp or a line-cusp permanent magnet, where a magnetic field can be applied in a local region and plasmas can be efficiently generated if the ECR condition is satisfied. In this paper, we report the structure of the ECR negative ion source, the characteristics of the ECR plasmas, and the comparison of the ECR plasmas with DC discharge plasmas from the viewpoint of a negative ion source.
Languages
eng
Resource Type
journal article
Publishers
応用物理学会
Date Issued
1999-07
File Version
Author’s Original
Access Rights
open access
Relations
[ISSN]0021-4922
[NCID]AA10457675
[isPartOf]
[URI]http://www.ipap.jp/jjap/index.htm
Schools
大学院理工学研究科（工学）