Yamada Yoichi

Affiliate Master Yamaguchi University

Spatial inhomogeneity of aluminum content in air-bridged lateral epitaxially grown AlGaN ternary alloy films probed by cross-sectional scanning near-field optical microscopy

Japanese journal of applied physics Volume 51 Issue 3 Page 035604-

published_at 2012-03

Title

Spatial inhomogeneity of aluminum content in air-bridged lateral epitaxially grown AlGaN ternary alloy films probed by cross-sectional scanning near-field optical microscopy

Creators Ishibashi Akihiko

Creators Murotani Hideaki

Creators Yokogawa Toshiya

Creators Yamada Yoichi

Languages eng

Resource Type journal article

Publishers Japan Society of Applied Physics through the Institute of Pure and Applied Physics

Date Issued 2012-03

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]0021-4922

[NCID]AA12295836

info:doi/10.1143/JJAP.51.035604

[isVersionOf] [NAID]http://ci.nii.ac.jp/naid/40019199809

[isVersionOf] [URI]http://jjap.jsap.jp

Schools 大学院理工学研究科（工学）