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Jiang Zhongwei

Affiliate Master Yamaguchi University

Stress analysis of a silicon-wafer slicer cutting the crystal ingot

Transactions of the ASME. Journal of mechanical design Volume 115 Issue 4 Page 711-717
published_at 1993-12
Title
Stress analysis of a silicon-wafer slicer cutting the crystal ingot
Creators Chonan S.
Creators Jiang Z.W.
Creators Yuki Y.
Languages eng
Resource Type journal article
Publishers American Society of Mechanical Engineers
Date Issued 1993-12
File Version Not Applicable (or Unknown)
Access Rights metadata only access
Relations
[ISSN]1050-0472
[NCID]AA10753248
info:doi/10.1115/1.2919259
[isVersionOf] [URI]http://asmedl.aip.org/MechanicalDesign/
Schools 大学院理工学研究科(工学)