Nakayama Masaharu

Affiliate Master Yamaguchi University

Thermal decomposition of tetrabromosilane and deposition of crystalline silicon

Materials Science in Semiconductor Processing Volume 23 Page 93-97

published_at 2014-07

Title

Thermal decomposition of tetrabromosilane and deposition of crystalline silicon

Creators Nakayama Masaharu

Creators Miyamoto Seiji

Creators Ogawa Takuro

Creators Osae Shogo

Creators Tomono Kazuaki

Creators Sumimoto Michinori

Creators Sakata Yoshihisa

Creators Komatsu Ryuichi

Creator Keywords

SiBr_4 Thermochemical decomposition Si deposition Flow reactor

Languages eng

Resource Type journal article

Publishers Elsevier Science

Date Issued 2014-07

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]1369-8001

[NCID]AA11350145

info:doi/10.1016/j.mssp.2014.02.045

[isVersionOf] [URI]http://www.sciencedirect.com/science/journal/13698001

Schools 大学院理工学研究科（工学）