Nakayama Masaharu

Affiliate Master Yamaguchi University

Investigations on hydrobromination of silicon in the presence of silicon carbide abrasives as a purification route of kerf loss waste

Separation and purification technology Volume 103 Page 109-113

published_at 2013-01-15

Title

Investigations on hydrobromination of silicon in the presence of silicon carbide abrasives as a purification route of kerf loss waste

Creators Tomono Kazuaki

Creators Furuya Hirotoshi

Creators Miyamoto Seiji

Creators Okamura Yuki

Creators Sumimoto Michinori

Creators Sakata Yoshihisa

Creators Komatsu Ryuichi

Creators Nakayama Masaharu

Creator Keywords

silicon silicon carbide kerf loss hydrobromination gas chromatography

Languages eng

Resource Type journal article

Publishers Elsevie Elsevier Sciencer

Date Issued 2013-01-15

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]1383-5866

[NCID]AA11136087

[NCID]AA11529807

info:doi/10.1016/j.seppur.2012.10.031

[isVersionOf] [URI]http://www.sciencedirect.com/science/journal/13835866

Schools 大学院理工学研究科（工学）