Yamamoto Setsuo

Affiliate Master Yamaguchi University

Characterization of CuCl nanocrystals in SiO_2 matrix fabricated by inductively coupled plasma-assisted sputtering deposition

Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena Volume 21 Issue 5 Page 2169-2173

published_at 2003-09

Title

Characterization of CuCl nanocrystals in SiO_2 matrix fabricated by inductively coupled plasma-assisted sputtering deposition

Creators Kurisu Hiroki

Creators Nagoya Kazutaka

Creators Yamada Naoko

Creators Yamamoto Setsuo

Creators Matsuura Mitsuru

Languages eng

Resource Type journal article

Publishers American Vacuum Society

Date Issued 2003-09

File Version Not Applicable (or Unknown)

Access Rights metadata only access

Relations

[ISSN]1071-1023

[NCID]AA10804928

info:doi/10.1116/1.1612518

[isVersionOf] [URI]http://scitation.aip.org/jvstb/

Schools 大学院理工学研究科（工学）