Yamamoto Setsuo

Affiliate Master Yamaguchi University

Low temperature sputter-deposition of Ni-Zn ferrite thin-films using electron-cyclotron-resonance microwave plasma

Transactions of the Materials Research Society of Japan Volume 28 Issue 4 Page 1105-1108

published_at 2003

Title

Low temperature sputter-deposition of Ni-Zn ferrite thin-films using electron-cyclotron-resonance microwave plasma

Creators Wada H.

Creators Yamamoto S.

Creators Kurisu H.

Creators Matsuura M.

Creators Shimosato Y.

Creator Keywords

Ni-Zn ferrite thin films reactive ECR sputtering high-rate deposition low temperature

Languages eng

Resource Type journal article

Publishers Materials Resarch society of Japan

Date Issued 2003

Rights

(C)The Materials Resarch society of Japan(日本MRS)()

File Version Version of Record

Access Rights open access

Relations

[ISSN]1382-3469

[NCID]AA10850652

Schools 大学院理工学研究科（工学）