Yamamoto Setsuo

Affiliate Master Yamaguchi University

Co-Cr films prepared by sputtering using electron cyclotron resonance microwave plasma

Journal of applied physics Volume 79 Issue 8 Page 4896-4898

published_at 1996-04-15

Title

Co-Cr films prepared by sputtering using electron cyclotron resonance microwave plasma

Creators Yamamoto S.

Creators Sato K.

Creators Kurisu H.

Creators Matsuura M.

Languages eng

Resource Type journal article

Publishers American Institute of Physics

Date Issued 1996-04-15

File Version Version of Record

Access Rights open access

Relations

[ISSN]0021-8979

[NCID]AA00693547

info:doi/10.1063/1.361925

[isVersionOf] [URI]http://jap.aip.org/

Schools 大学院理工学研究科（工学）