High thermal efficiency-type laminar plasma jet generator for plasma processing
Vacuum Volume 59 Issue 1
Page 47-54
published_at 2000-10
Title
High thermal efficiency-type laminar plasma jet generator for plasma processing
Creators
Osaki Katashi
Creators
Fukumasa Osamu
Creators
Kobayashi Akira
Creator Keywords
Plasma jet generator
Thermal plasma
Laminar plasma
Plasma processing
A laminar plasma jet was produced by the forced constricted-type plasma jet generator with a vortex gas injection-type nozzle, in which the forced elongated arc was constricted locally and the wall was cooled by the vortex gas flow. The stable and long laminar plasma jet with high heat energy was obtained at a total working gas flow rate of less than 7 l/min and a vortex gas flow ratio, i.e. the ratio of the vortex gas flow rate to the working gas flow rate, of 0.1?0.3. Also, the arc voltage?current characteristic of the elongated arc was a rising characteristic in spite of the low gas flow rate, and the thermal efficiency of this generator was improved slightly.
Languages
eng
Resource Type
journal article
Publishers
Elsevier
Date Issued
2000-10
File Version
Not Applicable (or Unknown)
Access Rights
metadata only access
Relations
[ISSN]0042-207X
[NCID]AA00879589
[isVersionOf]
[URI]http://www.sciencedirect.com/science/journal/0042207X
Schools
大学院理工学研究科（工学）